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Liquid Particle Counters
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Liquid Particle Counters

( Công ty TNHH Công nghệ ATP Việt Nam )

Model: LiQuilaz

Manufactory: Particle Measuring Systems (PMS) - USA

The LiQuilaz® optical particle counters are volumetric particle counters with a variety of sizing sensitivities as low as 0.2 microns. They provide high precision analysis for most process chemicals, including hydrofluoric acid and hot corrosive chemicals up to 150°C.

Volumetric particle counters offer the highest precision possible by measuring 100% sample volumes (up to 80 mL/min.) so that short sampling intervals can be utilized without sacrificing statistical significance.


  • Yield Improvement

  • Real-time characterization and analysis of particle contamination for immediate response to contamination

  • Volumetric measurements provide greater accuracy for tighter process control

  • Optional Facility Net software makes process control easy by providing alarm settings, status conditions, sampler setup, and online help

  • Versatile

  • Supports a wide range of applications and fluids

  • Works with compression or syringe samplers

  • Compatible with various tubing standards

  • In-line and batch sampling capabilities

  • RS-485 networking compatibility

  • Easy To Use

  • Small footprint for easy placement anywhere in the process

  • Flexible software provides numerous viewing options for real-time or retrieved data

  • User selectable particle size thresholds


  • Effervescent chemical measurements using compression sampling

  • Chemical quality assurance

  • Process bath monitoring

  • DI water monitoring

  • Chemical delivery systems

  • Photoresist monitoring



Laser Particle Counter: The LiQuilaz particle counter is designed to accurately sample liquids for a wide range of applications. From batch sampling to in-line monitoring, the LiQuilaz particle counter is capable of measuring particulates in fluids with various refractive indexes, viscosities and operating temperatures. Components of the LiQuilaz particle sensor include an optical bench and electronics. The sensor is capable of detecting particle counts for fifteen channels starting at a minimum sensitivity of 0.2 um. These thresholds are completely adjustable through the software and allow an operator to properly characterize the particle sizes and concentration levels.

The sampled data from the LiQuilaz particle counter are processed using a powerful Windows-based software program, Pharmaceutical Net. This program enables an operator to collect, display, store and report in many different formats. The Pharmaceutical Net program is very flexible for use as a simple monitoring tool or as an advanced analysis package.

Learn more about our microcontamination monitoring services.

This particle counter is CE certified.

LiQuilaz® is a registered trademark of Particle Measuring Systems.

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Last Updated: Wednesday, 01 February 2023 02:43