Particle Counters for Inline Chemicals

Model: HSLIS M65

Manufactory: Particle Measuring Systems (PMS) - USA

HSLIS M65 and HSLIS M65 UL1604 liquid particle counters allow continuous, real-time monitoring of fluid particle contamination levels in Class I, Div II environments. Reduce costs with particle counters that can be installed without modification into these critical monitoring areas. Sizing sensitivity of 0.065 µm. Easily integrates into Facility Net software to provide an economical way to monitor multiple flow systems.

BENEFITS

• Cost Effective:

• Packaged for easy installation into Class I, Div II environments

• Particle measurements for solvents, chemicals, and DI water

• Simplify data analysis by using the same sensor throughout all of your fabs

• Low initial capital investment because packaging has already been completed

• Sealed package protects sensor from accidental chemical spills

• Use with Facility Net FMS Software:

• Ethernet or RS-485 communication protocols

• Data time plots for simplified data interpretation

• Alphanumeric paging and emailing functions to alert operators to out of tolerance conditions

APPLICATIONS

• Qualify particle concentrations in flammable solvents

• Monitor chemical delivery systems

• In-line measurements in recirculating baths

• Quality assurance

• Continuous monitoring for process improvement

LINKS TO MORE INFORMATION:

• Basic Guide to Particle Counters and Particle Counting

• Particle Distribution Calculator for Liquid Particle Counters

• Simplified Performance Calculator for Liquid Particle Counters

• Which Particle Counter is Best for You? Measurement of DI Water and Fluids

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